AMAT Rotary Target
mary@sunriseta.com
Proprietary rotary cathode technology enables nearly 3x higher target utilization than any competitive system. Each deposition module of the PiVot system features an array of large-volume, rotary targets that have >4x longer lifetime than conventional planar targets. The PiVot system’s deposition modules feature an innovative pre-sputter unit that enables target conditioning using only one substrate, rather than up to 50 substrates that are needed with other systems to achieve the same results.
To provide a rotary target assembly forming a rotary target in which a cylindrical target and a cylindrical supporting pipe are firmly combined.
The rotary target assembly includes a cylindrical target and a cylindrical supporting pipe. The difference between the inside diameter of the cylindrical target and the outside diameter of the cylindrical supporting pipe is substantially equal to a value obtained by multiplying the yield strain of the target material by the inside diameter of the cylindrical target and N. In this case, the N is a value in the range from 1 to 10. The difference can be adjusted by the dimensions of the target material and the cylindrical target, and, as a result, the cylindrical target can be firmly bonded to the cylindrical supporting pipe. In this way, the thermal conductivity and electric conductivity of the rotary target improve.
The rotary target assembly includes a cylindrical target and a cylindrical supporting pipe. The difference between the inside diameter of the cylindrical target and the outside diameter of the cylindrical supporting pipe is substantially equal to a value obtained by multiplying the yield strain of the target material by the inside diameter of the cylindrical target and N. In this case, the N is a value in the range from 1 to 10. The difference can be adjusted by the dimensions of the target material and the cylindrical target, and, as a result, the cylindrical target can be firmly bonded to the cylindrical supporting pipe. In this way, the thermal conductivity and electric conductivity of the rotary target improve.
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